[labnetwork] HSQ Availability

[Kevin Lister]

Hi Matt,
I would suggest you look at DisChem (https://discheminc.com/ <https://discheminc.com/>) as they have a good HSQ substitute with a short lead time. I have no affliction with DisChem.

Allresists’ Medusa 82 is not really a direct substitute for HSQ.

Best Kevin

 



> On Feb 15, 2023, at 9:14 AM, Matt Moneck <mmoneck at andrew.cmu.edu> wrote:
> 
> Hi All,
>  
> I would like to solicit your feedback on HSQ options for ebeam litho.  Our group has traditionally worked with Dow Corning’s XR-1541-002 HSQ, and it has fit our needs for many years.  However, as our stock is now reaching a reorder point, we have reached out to vendors for quotes only to find that pricing has increased to a level we could have never imagined (not to mention lead times on the order of 80 business days).  With that in mind, we have been looking at alternative suppliers, including EM Resist (distributed through Integrated Micro Materials) and Allresist (Medusa 82).  
>  
> If anyone has experience working with the EM Resist and Allresist products, we would appreciate any feedback you might you might have on how they compare to the XR-1541.  For example, do you see any major differences in resolution, adhesion, dosing, etch resistance, etc.?  
>  
> If you have other alternatives, we would love to hear about them as well, although, we do prefer to buy pre-mixed solutions as opposed to mixing dry HSQ with MIBK ourselves.  
>  
> Best Regards,
> 
> Matt
>  
> --
> Matthew T. Moneck, Ph.D
> Executive Director, Claire & John Bertucci Nanotechnology Laboratory
> Electrical & Computer Engineering | Carnegie Mellon University
> 5000 Forbes Avenue, Pittsburgh, PA 15213-3890
> Phone: 412-268-5430
> ece.cmu.edu <http://ece.cmu.edu/> 
> nanofab.ece.cmu.edu <http://nanofab.ece.cmu.edu/>
>  
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