[labnetwork] SPTS Rapier Module - Laser/White Light Interferometry

[James Grant]

Hello all,

Been almost two weeks since I posted this and believe we have come to some conclusions. Many thanks to all those who contributed. Tyndall and EPFL people were especially helpful.


  1.  We had a lot of back and forth with SPTS. They said that while they could see benefit of laser interferometry for our application, they currently did not offer the hardware to mount laser interferometry endpoint systems to the Rapier. We asked them to quote to so do, but they were unwilling. Fair enough.
  2.  I don't think the folks at Tyndall will mind me mentioning the challenges they have faced in getting laser interferometry on their SPTS Synapse module working. I understand the issue is spot stability and wobble, thought to be cased by heat from chamber walls - they Synapse walls are heated to 130oC. It's thought this won't be a problem on the Rapier as chamber walls are only heated to 55oC. Let's hope so.
  3.  We sent pictures and some dimensions of the pre-drilled holes at the top of our Rapier to Intellemetrics, our preferred laser endpoint system vendor. They believe it possible to mount a LEP 500 unit to the tool with not too much trouble.

Hope summary information is useful.

Cheers,

James

Dr. James Paul Grant
Research Engineer in Plasma Processing

Plasma Etch Group
james.grant at glasgow.ac.uk<mailto:james.grant at glasgow.ac.uk>

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From: James Grant
Sent: 06 February 2023 14:38
To: labnetwork at mtl.mit.edu
Subject: SPTS Rapier Module - Laser/White Light Interferometry

Hello,

Hoping the community can feedback on their experiences.

In 2019 we purchased an SPTS Rapier DSiE tool. As well as doing Bosch processing we also require the tool to do mixed process etching. Quite a few of our users, on our other Si etch tools (OIPT Estrelas and STS Multiplex), use mixed process to etch SOI materials or a-Si on fused silica substrates. These systems have Intellemetrics LEP 410/500 red laser interferometer units for the purpose of end-point detection.

When we purchased the Rapier, SPTS did tell us that a laser end-point system could not be used. They encouraged us instead to use the Claritas OES system on the tool, however when we pointed out our typical use scenario (small substrate size, low % open area) they admitted that the Claritas would struggle to differentiate when to end-point. Our preferred laser interferometer vendor, Intellemetrics, say they have sold LEP 500 red laser interferometer units to SPTS but cannot say on what systems they have been used.

We have found that EPFL use white light interferometry<https://www.epfl.ch/research/facilities/cmi/equipment/etching/spts-rapier/> end-point detection on their Rapier module - have contacted Phillipe Fluckiger separately.

My question to the community is has anyone used a laser interferometry system on an SPTS Rapier? If so, could they feedback with their experiences. Apologies I'm asking such an open question!

Cheers,

James

Dr. James Paul Grant
Research Engineer in Plasma Processing

Plasma Processing Group
james.grant at glasgow.ac.uk<mailto:james.grant at glasgow.ac.uk>

 [cid:image001.png at 01D9444F.CE818480]
      www.JWNC.gla.ac.uk<http://www.jwnc.gla.ac.uk/>
[cid:image002.png at 01D9444F.CE818480]  LinkedIn.com/company/JWNC
[cid:image003.png at 01D9444F.CE818480]  @UofG_JWNC<https://twitter.com/uofg_jwnc>

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