[labnetwork] Cryo-piping contractors for LN2 piping sought

[Jeff Hawks]

https://www.appliedenergysystems.com/

 

From: labnetwork [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of
Collins, Deon
Sent: Tuesday, February 28, 2023 4:37 PM
To: Metzler, Meredith G. (Fed); labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] Cryo-piping contractors for LN2 piping sought

 

Your vacuum jacket has failed. We are going through the same situation with
our static LN2 delivery lines. 

 

Is your phase separator a Static or Dynamic system?

 

From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Metzler,
Meredith G. (Fed)
Sent: Tuesday, February 28, 2023 2:08 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Cryo-piping contractors for LN2 piping sought

 

We are hoping the community can assist us in identifying a vendor who can
inspect an existing LN2 delivery piping system in the cleanroom for our
cryo-etch tools. We've recently started experiencing issues with a phase
separator that keeps building up a large block of ice on the outside of it.

 

We have a 5 Gallon phase separator made by Chart Inc with one outlet. It
feeds liquid nitrogen to several tools in the etch bay of the cleanroom. The
LN2 system is house regulated to 40 PSI at the inlet. The unit separates the
gaseous N2 from the liquid. The liquid is stored in the 5 gallon volume
surrounded by a vacuum jacket to prevent icing. The final LN2 inlet
connection to the phase separator, the exhaust connection, and the over
pressure relief connection seem to be the biggest points of failure. At
these three points we have cold air and moisture condensation that forms an
ice ball.

 

Although, we have made many at wrapping and insulating these connection
points, we cannot quite get the coverage to eliminate this ice ball.

 

Does the community have any preferred cryo-piping contractors they can
recommend to assist with solving this issue and any of our future
cryo-piping needs?

 

Thanks!

 

Meredith Metzler

National Institute of Standards and Technology, Physical Measurement
Laboratory

Process Engineer - Center for Nanoscale Science and Technology Facility,
NanoFab

100 Bureau Drive, Mail Stop 6201, Building 216

Gaithersburg, MD 20899

301-975-8187

meredith.metzler at nist.gov

https://www.nist.gov/cnst
<https://urldefense.com/v3/__https:/www.nist.gov/cnst__;!!DZ3fjg!-6Lfwk5cCgF
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