[labnetwork] Treating silane exhaust from PECVD

[Michael Yakimov]

You may look at the company "CS cleans". They are making room temperature beds for treatment of hydrides and metalorganics. Their main focus is MOCVD of 3-5, but they can do Silane and ammonia as well (that's what we have)

The other aspect is you may have to deal with CF4 cleaning of PECVD, and they also have acid gas treatment possible in the same column. There is plenty of fine print there, though.


https://www.cscleansolutions-usa.com/


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From: labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of Hadi Esmaeilsabzali <hadi_esmaeilsabzali at sfu.ca>
Sent: Thursday, January 12, 2023 2:35:22 PM
To: labnetwork at mtl.mit.edu <labnetwork at mtl.mit.edu>
Subject: [labnetwork] Treating silane exhaust from PECVD


Dear Colleagues,

For those who run PECVD at their facilities, I am wondering how you process the exhaust from your systems.

We used to treat the PECVD exhaust along with that of the SiNx tube furnace through a TPU. We have recently decommissioned our furnace and TPU as they were too costly to run and are looking at alternative exhaust options for the PECVD only. We use our PECVD tool for oxide and nitride deposition, and it's worth noting that it only uses silane (no ammonia).

Some colleagues had mentioned that they don't use a TPU/scrubber and send the process waste to the building exhaust (untreated). Given that our PECVD processes use a relatively small silane flow (~30 sccm for up to 30 mins per run each week - all max values) and it is significantly diluted, this sounded a practical option. I am trying to see if others have tried or can comment on this approach, particularly for a silane-based PECVD process. Aside from the flammability concerns, we are also aware of the potential oxide buildup in the exhaust system over time.

I appreciate it if you share other (cost-effective) suggestions you might have for us!

Thanks,
Hadi


Hadi Esmaeilsabzali, PhD

Nanofabrication Group Manager, 4D LABS

Simon Fraser University

8888 University Dr., Burnaby, B.C. V5A 1S6
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