[labnetwork] 3rd party ASML support

Matthew Moneck mmoneck at andrew.cmu.edu
Tue Jan 31 19:50:00 EST 2023


Hi Demis,



EO Technical Solutions has been servicing our ASML 5500/80 for a number of
years.  They have been fantastic to work with.



https://eotechnical.com/service-and-training/



Best Regards,


Matt



--

*Matthew T. Moneck, Ph.D*

Executive Director, Claire & John Bertucci Nanotechnology Laboratory

Electrical & Computer Engineering | Carnegie Mellon University

5000 Forbes Avenue, Pittsburgh, PA 15213-3890

Phone:  412-268-5430

ece.cmu.edu <http://www.ece.cmu.edu/>

nanofab.ece.cmu.edu <http://www.nanofab.ece.cmu.edu/>



*From:* labnetwork <labnetwork-bounces at mtl.mit.edu> *On Behalf Of *Demis D.
John
*Sent:* Tuesday, January 31, 2023 6:06 PM
*To:* labnetwork <labnetwork at mtl.mit.edu>
*Subject:* [labnetwork] 3rd party ASML support



Can anyone provide contact info for a 3rd party servicer for ASML tools
that are end-of-life?

(Asking for a colleague, not our own tool.)



Thanks,

-- Demis



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 *UCSB Nanofabrication Facility* <https://www.nanotech.ucsb.edu/>

         Demis' Contact Info
<https://wiki.nanotech.ucsb.edu/wiki/Demis_D._John>

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