[labnetwork] Heidelberg alternatives?

[Peter Lomax]

Hi Brian,

The same here for Durham Magneto Optics – we have had a really good relationship with them over the last 5 years and the tool has proved very popular and versatile including grey scale litho, back side alignment and we have had the optics and light sources upgraded to improve the feature size.

Best

Peter

From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Tobi Beetz
Sent: 03 July 2023 21:27
To: Brian K. Olmsted <olms0025 at umn.edu>; Lab Network (labnetwork at mtl.mit.edu) <labnetwork at mtl.mit.edu>
Cc: Thomas Eugene Carver <carver at stanford.edu>
Subject: Re: [labnetwork] Heidelberg alternatives?

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Hi Brian – I can highly recommend Durham Magneto Optics as we’ve had the exact opposite experience working with them.

We bought our first DWL tool from them a few years ago. I was initially skeptical and had urged our staff to consider adding a Heidelberg. We ended up with the Durham and have been absolutely thrilled with their responsiveness and collaboration. The tool has been a huge success with our community, and we added another one last year (365nm and 385nm). Some of our users use the Heidelbergs at SNF and the ML3s at SNSF as they have some complementary features. More info on the tool at https://snsf.stanford.edu/facilities/fab/fcr/ml3 . There is also a section below on the website that has tons of additional info that might be interesting to dig through. Finally, the price of an ML3 is another huge plus …

Cheers,

Tobi

Tobi Beetz, Ph.D.
Associate Director, Stanford Nano Shared Facilities, Stanford University, http://snsf.stanford.edu<http://snsf.stanford.edu/>

From: labnetwork <labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu>> On Behalf Of Brian K. Olmsted
Sent: Monday, July 3, 2023 11:57 AM
To: Lab Network (labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>) <labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>>
Subject: [labnetwork] Heidelberg alternatives?

Hi,

We are poised to buy a Heidelberg DWL 66+ but we have been having an abysmal experience with field service from Heidelberg and their lack of urgency / responsiveness has been deleteriously impacting our operations and reputation for over a year now.

Before we move forward with adding a new Heidelberg tool I wanted to reach out to the community to ask (1) if anyone uses a 3rd party for field service on Heidelberg direct-write tools that they would recommend, and (2) if there are alternative manufacturers anyone has experience with that they would recommend?

Thanks,

Brian K. Olmsted
Associate Director of Laboratory Operations
University of Minnesota | Minnesota Nano Center
cse.umn.edu/mnc<http://cse.umn.edu/mnc>
612.626.3287
olms0025 at umn.edu<mailto:olms0025 at umn.edu>

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