[labnetwork] Antireflective coating for Litho process

Bikash Dev Choudhury d.c.bikash at iitb.ac.in
Fri Jun 23 05:26:48 EDT 2023



Dear Labnetwork,

I am looking for antireflective coating for both top and bottom layer in 
photolitho process.

Looking forward for any lead/info.

Thanks in advance!

--
Best Regards
Dr. Bikash Dev Choudhury
Sr. Process Technologist
CEN, IITBNF
Electrical Engineering Department
IIT Bombay, Mumbai-400076
Mobile No. 7400319871
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