[labnetwork] Name that tool

[Craig Cheney]

Lam Research 580/590 plasma etch tool.   Spent many years working on them many many years ago.

Thank you,

Craig Cheney
Owner, President
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From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Jim Mitchell
Sent: Wednesday, November 8, 2023 5:41 AM
To: Lab Network (labnetwork at mtl.mit.edu) <labnetwork at mtl.mit.edu>
Subject: [labnetwork] Name that tool

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--
Jim Mitchell
Science Wafer Services
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