[labnetwork] Gas cabinets for Ammonia and 2-5% Silane

[Kyle Keenan]

Applied Energy Systems:

https://www.appliedenergysystems.com/

On Wed, Nov 22, 2023 at 8:19 AM Kevin M McPeak <kmcpeak at lsu.edu> wrote:

> Dear Colleagues,
>
> The LSU Nanofab will install an Oxford PECVD system for SiO2, SiNx, and
> a-Si deposition next year. We are getting quotes for ammonia and silane gas
> cabinets in preparation for the PECVD.
>
> So far, we have received quotes for Ammonia and Silane gas cabinets from
> SDC, SilPac, Matherson, AirGas, and Critical Systems.
>
> Are we missing anyone? We have discussed the details of the installation
> with our local safety folk but input from the list of recommended gas
> cabinet manufacturers would be most appreciated. We are especially
> interested in reconditioned systems if they exist. Thanks!
>
> Regards,
> Kevin
>
> --
> Kevin M. McPeak
> Associate Professor | LSU Dept. of Chemical Engineering
> 225-578-0058 | mcpeaklab.com | lsu.edu/nanofabrication
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-- 
Kyle Keenan

Senior Manager - Laboratory Operations
Quattrone Nanofabrication Facility
University of Pennsylvania
P: 215-898-7560
F: 215-573-4925
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