[labnetwork] [EXTERNAL] companies that refill ALD precursor cylinders

Nabeel Aslam nabeel.aslam at kaust.edu.sa
Wed Oct 18 16:34:11 EDT 2023


Hi Kyle,

We had same issue but then we came to know that JACs( Japan advance chemicals) provide the service to refill the used ALD bubblers.
They will charge for cleaning, Maintenace and refilling of precursor of used bubbler.
Regards,
Nabeel

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________________________________
From: labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of Kyle Keenan <kckeenan at seas.upenn.edu>
Sent: Wednesday, October 18, 2023 7:56:22 PM
To: Lab Network (labnetwork at mtl.mit.edu) <labnetwork at mtl.mit.edu>
Subject: [EXTERNAL] [labnetwork] companies that refill ALD precursor cylinders

Hi Folks,

Can anyone recommend a company that will refill used ALD precursor bottles with the original chemical? We normally use Strem for this purpose, but I was just informed that they have put a stop of indeterminate length to accepting used cylinders from customers, while they review their procedures. It was suggested that I check back in a month to see where things stand, but we cannot afford to wait that long, and I would really like to avoid that extra thousands of dollars it would cost to have to buy replacement precursors in new bottles (which have a nearly one month lead-time through Strem).

I look forward to your replies.

Thank you,
--
Kyle Keenan

Senior Manager - Laboratory Operations
Quattrone Nanofabrication Facility
University of Pennsylvania
P: 215-898-7560
F: 215-573-4925
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