[labnetwork] Jupiter Callisto abatement system N2 usage

[Rob Breisch]

Hi Joseph -

That does seem like a lot of N2.  Are you supposed to include any N2 purge from the pump in those numbers.  For example, an Edwards iQDP80 will typically have a ~ 50SLM purge, so in the case of the 3 CFM purge requirement, it's only an additional 30-40 SLM (1-1.5 CFM).  All that N2 is going to flow through into the Callisto.

Also, if you are abating a process that requires passivation of the abatement column, that does often require extra N2, so perhaps that where the higher levels are coming from.  To be clear, that should process dependent and not always necessary to the best of my knowledge.

My experience with dry abatement using granulate (I believe this how Callisto work) is that there is also an upper limit on N2 as well where too much Nitrogen reduces the residence time of the effluent within the cannister, making the abatement less effective.

There are other options for dry abatement if you are looking for something with lower N2 consumption.

Regards,


Rob Breisch
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From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Joseph Losby
Sent: Friday, September 15, 2023 11:33 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Jupiter Callisto abatement system N2 usage

Hi everyone,

According to Critical Systems inc., 18 CFM (7 CFM emergency purge, 3 CFM normal purge, 8 CFM venturi pump) of N2 should be allocated to the Jupiter Callisto abatement system.  That seems like a lot to allocate to one piece of equipment.  Do any of you have any experience with them, and is this N2 usage realistic?  Is there a situation where the normal and emergency purges kick in at the same time?

Cheers,
Joe


Joe Losby, PhD
Manager, qLab Operations



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