[labnetwork] Oxford Black PLC Failure

Shawn Wright wrightsh at lnf.umich.edu
Wed Aug 21 08:51:10 EDT 2024


Hello Everyone,

Our old Oxford Plasmalab System 100 (ICP RIE) had a failure with its PLC, and it’s the older black style.  Does anyone know of a company that works on these older systems and possibly retrofits them? I haven’t been very successful with Oxford, it seems that this system is too old for them to consider taking on.

Thanks,
Shawn Wright
Lurie Nanofabrication Facility
University of Michigan


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