[labnetwork] Gas cabinets for BCl3 - recommendations?

[Collins, Deon]

We just completed an install from Critical Systems Inc. WE ordered multiple cabinets to include a BCL3 cabinets retrofit. I would suggest whom ever you go with look into a sub atmospheric regulator on the panels. This will help with the gas delivery and probably negate the need for heat trace on the process delivery line.

Deon D. Collins


Director of Facilities
The Grainger College Of Engineering UIUC
Holonyak Micro & Nanotechnology Lab
208 N Wright St Rm. 1114 | MC-249
Urbana, IL 61801
217-300-7531 | deonc69 at illinois.edu<mailto:deonc69 at illinois.edu>


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From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Nathan Nelson - Fitzpatrick
Sent: Wednesday, August 28, 2024 7:43 AM
To: Price, Aimee <price.798 at osu.edu>; labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] Gas cabinets for BCl3 - recommendations?

Hi Aimee,

Our fab’s gas cabinets are mostly from SDC.  We’ve been working with these cabinets for 10 years with mostly positive things to say.  I particularly like the ease of use of the touchscreen user interface we have on our cabinets.  They are easy to understand, and we have not had any incidents of operator error in working with these cabinets.  I’m happy to speak with your colleague if they want to ask any questions.

Best,
  -Nathan

--
Nathan Nelson-Fitzpatrick  PhD, PEng   (He/Him)
Director, Quantum-Nano Fabrication and Characterization Facility (QNFCF)
Office of Research
University of Waterloo
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P: 519-888-4567 ext. 31796
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From: labnetwork <labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu>> on behalf of Price, Aimee <price.798 at osu.edu<mailto:price.798 at osu.edu>>
Date: Tuesday, August 27, 2024 at 8:11 PM
To: labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu> <labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>>
Subject: [labnetwork] Gas cabinets for BCl3 - recommendations?
Hello Labnetwork,
I have a colleague (former undergraduate intern) who is asking about alternative suppliers for gas cabinets for BCl3.  AES has some long lead times right now, so they were looking at alternatives.  They got a quote from a company called SDC but has no information on them and we have not used them here.  Has anyone worked with SDC before for gas cabinets that is willing to share their experience?

This is the SDC website.
Gas Delivery Cabinets | SDC® (stainlessdesign.com)<https://urldefense.com/v3/__https:/www.stainlessdesign.com/products/uhp-gas-cabinets/__;!!DZ3fjg!7EU-hO8kmblr1JIQrdhi94m0XXz8ASM1uMB6iYwSp8XEVpW07ZliolNaueWD5TUjy1URxfHpR7_CKGiB4nk1EEhG6OLebS8GyjQ$>

Thanks for any information you can share.

Best,
Aimee Bross Price
Manager, Nanofabrication
The Ohio State University
Nanotech West Lab
Institute for Materials Research
1381 Kinnear Road
Suite 100
Columbus, OH 43212
614-292-2753
Price.798 at osu.edu<mailto:Price.798 at osu.edu>
Nanotech.osu.edu

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