[labnetwork] [Labnetwork] CHA SE-600 ebeam evaporator and STS vision 320 RIE mark II system

[Gohmyeong Bae]

Dear Lab Network,

We are seeking experts to repair our 40- and 20-years old tool.

One is the ebeam evaporator that comes from CHA with model number SE-600(pumping issues or leakge), the other is RIE system from STS with model number 320 Mark II(PLC communication error).

Both of them, we don't have any blueprint or gas schematic flow right now.

Our school is located in the western Massachusetts region called as Amherst 01003.

If there is a company or 3rd vendor that can introduce experts to our facility, it would be grateful.

Thank you.

Best,
Gohmyeong Bae.

Gohmyeong Bae, M. S.
He/Him/His
Institute of Applied Life Science (IALS)
Cleanroom Facility Manager for Nano and Device Fabrication Cleanroom
Conte building B111, Marcus Hall 25
Amherst, MA 01003
413-472-1570
gohmyeongbae at umass.edu

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