[labnetwork] Management and handling of Dichloro Silane

[Chiara Gionco]

Hi Robert,

that is indeed helpful. Can I ask you if the cabinet is inside or outside
the building?

Thanks,

Chiara Gionco, Ph.D.
Researcher
011-3919 214
Italian National Metrology Institute (INRiM)
Strada delle Cacce 91, 10135, Torino (Italy)


On Tue, 26 Nov 2024 at 18:39, Robert Vandusen <
RobertVandusen at cunet.carleton.ca> wrote:

> Hi Chiara.
>
> At our facility we use DCS for our LPCVD silicon nitride process.
>
> Our gas cabinet is ~ 15 feet away from the system. We use unheated ¼” OD
> (1/8 ID) SS gas lines to feed the Nitride tube nupro valve which is on the
> bottle side of the MFC.
>
> We set the pressure at the bottle regulator to 5-7 psi (there is a note
> that DCS liquifies at 9.6psi).
>
>
>
> Also since we do not use our LPCVD nitride process every day (maybe once
> or twice a week) we purge out the DCS MFC after every run and flow N2
> through it while in standby mode.
>
> This helps to prolong the MFC life.  The N2 is pumped out and the MFC is
> leakchecked before introducing the DCS for the next run.
>
> Before this procedure we were going through several MFCs/ year.
>
>
>
> Hope this helps.
>
>    Robert Vandusen
>    Microfabrication Cleanlab Facility Manager
>    Electronics Department
>    Carleton University
>    room: 4184 Mackenzie Building
>    613-520-2600 ext 5761
>    Robert_vandusen at cunet.carleton.ca
>
>
>
>
>
>
>
> *From:* labnetwork <labnetwork-bounces at mtl.mit.edu> *On Behalf Of *Chiara
> Gionco
> *Sent:* November 26, 2024 8:39 AM
> *To:* labnetwork at mtl.mit.edu
> *Subject:* [labnetwork] Management and handling of Dichloro Silane
>
>
>
> [External Email]
>
> Dear labnetwork,
>
> I'm Chiara Gionco, and I am a researcher at INRiM, the Italian Institute
> of Metrology and I'm part of the Managing Committee of our new Cleanroom
> facility, shared with Politecnico di Torino and Università degli Studi di
> Torino.
>
> We are in the process of acquiring gas facilities to support an LPCVD
> system (Tystar MiniTytan 1600) in our cleanroom, and I would greatly
> appreciate any feedback regarding the management and handling of Dichloro
> Silane.
>
> To ensure the best practices for our installation, I would like to inquire
> about how DCS is handled at your institute. Specifically, I am interested
> in the following:
>
> 1.       *Distance Between Gas Cabinet and Instrument:* How far is the
> gas cabinet located from the LPCVD system?
>
> 2.       *Gas Line Configuration:* Is the gas line and the bottle heated,
> and if so, what specifications are followed for heating it?
>
> 3.       *Issues related to the DCS gas line*: Are there any common
> issues related to the DCS gas line after installation? What are your
> solutions?
>
> 4.       *Safety Measures:* Are there any additional precautions or
> setups you would recommend to ensure safe and efficient operation?
>
> Thank you very much for your time and assistance.
>
> Best regards,
>
> Chiara Gionco, Ph.D.
>
> Researcher
>
> 011-3919 214
>
> Italian National Metrology Institute (INRiM)
>
> Strada delle Cacce 91, 10135, Torino (Italy)
>
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