[labnetwork] PH3 cylinder part number

[Stephen Polly]

Hi Deon,

If you order 10 pound bottles and the gas cabinet has scales, when you get to 5 pounds remaining on a source, trigger another order of a 10 lb bottle so there is never more than 15 lb on site but you can have a spare on hand for immediate change outs as needed.

Part numbers are:
G2672843DP;Arsine ULTIMA GX PDISS632SS 10lb
G2675709DP; Phosphine ULTIMA GX PDISS632SS 10lb

Cheers,
Steve


Stephen Polly, Ph.D.
Operations Manager
Semiconductor Nanofabrication Laboratory
Kate Gleason College of Engineering
Rochester Institute of Technology
Engineering Hall 2572
82 Lomb Memorial Drive
Rochester NY 14623
https://www.rit.edu/nanofab/
W: 585-475-6811
sjpvpr at rit.edu<mailto:sjpvpr at rit.edu>
[RIT | Rochester Institute of Technology]<https://www.rit.edu/engineering>

From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Collins, Deon
Sent: Tuesday, December 17, 2024 1:07 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] PH3 cylinder part number

This conversation is for facilities within the US using PH3 and AsH3.

With CFATS lapsing what volume of PH3 AsH3 is your facilities ordering? Our Division of Research and Safety, understandably, would like to abide by the volume limitations just in the event CFRATS is resurrected. I am of the understanding that CFATS is on the back burner for a while if not indefinitely. CFATS volumes seem to create an obstacle that our local gas distributor does not want to help us manage. With CFATS and our H-5 Semiconductor certification we are only allowed to have limited quantities listed in the tables below. Our local municipalities have no f regulations limiting these materials other that the state and Federal regulations.

What volumes of Phosphine and Arsine is your facility ordering? What vendor are you using and what are the part numbers? DRS would prefer 15# of product to minimize cylinder change out and still fall under the CFATS regulations.

We have been asking Airgas and Matheson for a part number for months. Neither have provided a part number for us to order PH3. We are using 100% AsH3 and PH3 in our process.




Chemicals of Interest (COI)

Synonym

Chemical Abstract Service (CAS) #
Release: Minimum Concentration (%)
Release: Screening Threshold Quantities (in pounds)
Theft: Minimum Concentration (%)
Theft: Screening Threshold Quantities (in pounds unless otherwise noted)
Sabotage: Minimum Concentration (%)
Sabotage: Screening Threshold Quantities
Security Issue: Release - Toxic
Security Issue: Release - Flammables
Security Issue: Release - Explosives
Security Issue: Theft - CWI/CWP
Security Issue: Theft - WME
Security Issue: Theft - EXP/IEDP
Security Issue: Sabotage/Contamination
Ammonia (conc. 20% or greater)

7664-41-7
20.00
20,000




X






Ammonium nitrate, [with more than 0.2 percent combustible substances, including any organic substance calculated as carbon, to the exclusion of any other added substance]


6484-52-2

ACG

5,000

ACG

400





X



X

Ammonium nitrate, solid [nitrogen concentration of 23% nitrogen or greater]


6484-52-2



33.00

2000








X

Ammonium perchlorate

7790-98-9
ACG
5,000
ACG
400




X


X

Ammonium picrate

131-74-8
ACG
5,000
ACG
400




X


X

Amyltrichlorosilane

107-72-2




ACG
APA






X
Antimony pentafluoride

7783-70-2




ACG
APA






X
Arsenic trichloride
[Arsenous trichloride]
7784-34-1
1.00
15,000
30.00
2.2


X


X



Arsine

7784-42-1
1.00
1,000
0.67
15


X



X



Phosphine

7803-51-2
1.00
10,000
0.67
15



X


X





Deon D. Collins


Director of Facilities
The Grainger College Of Engineering UIUC
Holonyak Micro & Nanotechnology Lab
208 N Wright St Rm. 1114 | MC-249
Urbana, IL 61801
217-300-7531 | deonc69 at illinois.edu<mailto:deonc69 at illinois.edu>


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