[labnetwork] Turbo pump PlasmaTherm 720 etcher

[Steve Lunn]

Hi Roman,
The folks at Turbo Vacuum in Florida have always done good work for us.  Scott Walden is the guy I usually work with.   s.walden at turbovacuum.com
Contact Turbo Vacuum


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Contact Turbo Vacuum

Contact Turbo Vacuum
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Cheers,
Steve Lunn

+1 408 221 1465 (Cell)

 

    On Monday, February 5, 2024 at 08:39:42 AM PST, Roman Akhmechet <romana at princeton.edu> wrote:  
 
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Hello,
 
Recently our Leybold turbo pump on an old PlasmaTherm 720 RIE tool has stopped spinning. The controller for the pump seems to be communicating, but the load stays low when trying to start the pump for about 10 minutes before going into failure, probably due to a time out. I’m wondering if anyone has a recommended vendor to repair turbo pumps, or advice on what other issue may be causing this. Thank you.
 
  
 
Roman Akhmechet
 
Princeton University 
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