[labnetwork] Lead (Pb) evaporation

[Yakimov, Michael]

EHS concerns aside, I wouldn't go with the idea for cross-contamination and process control reasons.
My personal rule of thumb is 1e-6 at 600C to start the conversation.Pb has a vapor pressure of 1e-6 at 420C.
 For <600C materials that means they will evaporate before crucible is red hot - hard to tune electron beam and visually control the deposition that way. May be easier with resistive process though.
The other thing is when you're running something high temperature, like Pt or Mo, things become pretty hot inside. Anecdotally, I had substrate - pretty far away from the source - go above 150C during Pt deposition. I don't know how high the source shutter would go, but 400C seems pretty plausible. Re-evaporation isn't something people like to think about in terms other than how to avoid that...




_______________________________________________

Michael Yakimov

Research scientist

Department  of Nanoscale Science and Engineering

University at Albany - State University of NY



253 Fuller rd.

Albany NY 12203



Phone: 518-437-8609 lab

e-mail: myakimov at albany.edu

________________________________
From: labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of Youry Borisenkov <yb2471 at columbia.edu>
Sent: Tuesday, July 16, 2024 3:57 PM
To: Fab Network <labnetwork at mtl.mit.edu>
Subject: [labnetwork] Lead (Pb) evaporation

Hi All,
Do any of you allow Lead (Pb) deposition on your evaporation tools?
If so, what are the precautions that you take to avoid Lead exposure hazards during PM,etc?

--
Thank you,
Youry Borisenkov
CNI<https://cni.columbia.edu/columbia-university-clean-room>
Columbia University
CEPSR 1017, New York, NY, 10027, United States.
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