[labnetwork] Ruthenium Phosphide

[Eran Lipp]

Dear Lab network,
We are considering introduction of RuP (Ruthenium Phosphide) into our clean room (Si, III-V and LiNb are allowed)
I see no risk to do photo or metal dep on this material but am wondering about etching- since Ru is carcinogenic..

Please share any info or comments about this material and known risks.
Thanks !


Dr. Eran Lipp
Director
Micro & Nano Fabrication Unit (MNFU)
Tel: +972-77 -8874205| Mobile: +972-52-3875339
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