[labnetwork] Magnetic materials in ALD system

[Iulian Codreanu]

Dear Colleagues,

We have received a request to allow magnetic material precursors in our 
Oxford FlexAL ALD, specifically Ferrocene and Nickelocene.

We have the following precursors installed:
-Manifold 1: TMA (Trimethyl Aluminum), TDMAH 
Tetrakis(dimethylamido)hafnium), Spare
-Manifold 2: Spare, TDMAT (Tetrakis(dimethylamino)titanium), ZrCMM 
(Bis(methylcyclopentadienyl)zirconium(IV) dichloride)

Does anyone out there have experience with Ferrocene and Nickelocene? If 
the answer is affirmative, what can you share with us/me?

I am very concerned about messing up the films we've been depositing for 
the past 6 or so years. What should we watch for in terms of contamination?

Oxford Instruments has not been of any help, really.

Thank you,

Iulian

-- 
iulian Codreanu, Ph.D.
Director, Nanofabrication Facility
University of Delaware
Harker ISE Lab, Room 163
221 Academy Street
Newark, DE 19716
302-831-2784
https://udnf.udel.edu