[labnetwork] Gas cabinet references

[Paolini, Steven]

We have Applied Energy Systems Inc. cabinets and VMB's. We have had a positive experience with the equipment and service from them.
Be sure to specify sub-atmospheric regulators for BCL3, this will ensure that the gas stays in the gas phase if you run them at approximately 5" HG. Heating the lines is not a good practice.
Equipment Dood

Steve Paolini
Principal Equipment Engineer
Harvard University Center for Nanoscale Systems
11 Oxford St.
Cambridge, MA 02138
617- 496- 9816
spaolini at cns.fas.harvard.edu
www.cns.fas.harvard.edu

From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Christophe Clément
Sent: Wednesday, May 29, 2024 10:50 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Gas cabinet references

Hello everyone

We are currently in the construction phase of our cleanroom and are planning to have a gas cabinet installed for the use of BCL3 on our RIE. The engineers and architects in charge of the construction project indicate that the gas cabinet will take over a year to supply. I'm not aware of the companies they consulted for the supply of this cabinet, but I guess they only asked companies in Canada.

Do you have any names of companies in North America capable of supplying gas cabinets, with contacts to share please?

Thank you for your help!
Christophe

Christophe Clément
Professionnel de recherche
Laboratoire de microfabrication (LMF)
Groupe des Couches Minces (GCM) www.gcmlab.ca<https://urldefense.proofpoint.com/v2/url?u=http-3A__www.gcmlab.ca_&d=DwMFAw&c=WO-RGvefibhHBZq3fL85hQ&r=-H4Z_jeDfTYjnKPXor15vLwzBllmg8gFrb9m_k9OGks&m=BDujt2-Lbhr2sP_2ZR8caUR8AFbKOtgL7B8Bmt5sy2mjbz26xrQGZWQbYn4WupRN&s=S_TNpNy4VJIteiV7t2Fl5eEBd85CYUKUaXmFdVdsyqY&e=>
Ecole Polytechnique de Montréal www.polymtl.ca<https://urldefense.proofpoint.com/v2/url?u=http-3A__www.polymtl.ca_&d=DwMFAw&c=WO-RGvefibhHBZq3fL85hQ&r=-H4Z_jeDfTYjnKPXor15vLwzBllmg8gFrb9m_k9OGks&m=BDujt2-Lbhr2sP_2ZR8caUR8AFbKOtgL7B8Bmt5sy2mjbz26xrQGZWQbYn4WupRN&s=NTDAFVO_piWKy5J9N1y9xkuPvn1KeuEHV5kbCNh06gw&e=>
Département de génie physique
* 2900 Boulevard Edouard Monpetit
Pavillon JAB
Campus de l'Université de Montréal
Montréal (Québec) H3T 1J4

* christophe.clement at polymtl.ca<mailto:christophe.clement at polymtl.ca>
* 514 340 4711 #2417
Fax : 514 340 5195



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