[labnetwork] Gas cabinet references

[Christophe Clément]

Hello Deon

Thank you for the information. For sure we will make sure to provide them
all necessary information (DISS and valve isolation type)

I’m sure the price for BCL3 is stratospheric! When I had to order gas
cylinder last year for our LPCVD, I was pretty chocked about the price

about 50K for 4 cylinder (PH3, SiH4, NH3.. Sih2Cl2
), crazy!



Thank you again

Best

Christophe



Christophe Clément

Professionnel de recherche

Laboratoire de microfabrication (LMF)

Groupe des Couches Minces (GCM) www.gcmlab.ca <http://www.gcmlab.ca/>

Ecole Polytechnique de Montréal  <http://www.polymtl.ca/> www.polymtl.ca

Département de génie physique

* 2900 Boulevard Edouard Monpetit

Pavillon JAB
Campus de l'Université de Montréal
Montréal (Québec) H3T 1J4


8  <mailto:christophe.clement at polymtl.ca> christophe.clement at polymtl.ca

( 514 340 4711 #2417

Fax : 514 340 5195







De : Collins, Deon [mailto:deonc69 at illinois.edu]
Envoyé : 29 mai 2024 12:52
À : Christophe Clément <christophe.clement at polymtl.ca>;
labnetwork at mtl.mit.edu
Objet : RE: Gas cabinet references



Critical Systems Inc is provided HMNTL with a new BCl3 cabinet for our
Rie. We were given a much shorter lead time.   Reach out to Mitchell
Roselius mroselius at criticalsystemsinc.com
<mailto:mroselius at criticalsystemsinc.com> . He can get you set up with a
quote. You will need to specify DISS connections as well as the pneumatic
isolation valve when ordering the cylinder. FYI BCL3 cylinder lead time is
60 days out. Be ready for the sticker shock on the cylinder quotes.



Deon D. Collins




Director of Facilities

The Grainger College Of Engineering UIUC
Holonyak Micro & Nanotechnology Lab
208 N Wright St Rm. 1114 | MC-249
Urbana, IL 61801
217-300-7531 | deonc69 at illinois.edu <mailto:deonc69 at illinois.edu>


 <http://illinois.edu/>

Under the Illinois Freedom of Information Act any written communication to
or from university employees regarding university business is a public
record and may be subject to public disclosure.



Life begins at the end of your comfort zone.


Propeck Amanda



From: labnetwork <labnetwork-bounces at mtl.mit.edu
<mailto:labnetwork-bounces at mtl.mit.edu> > On Behalf Of Christophe Clément
Sent: Wednesday, May 29, 2024 9:50 AM
To: labnetwork at mtl.mit.edu <mailto:labnetwork at mtl.mit.edu>
Subject: [labnetwork] Gas cabinet references



Hello everyone



We are currently in the construction phase of our cleanroom and are
planning to have a gas cabinet installed for the use of BCL3 on our RIE.
The engineers and architects in charge of the construction project
indicate that the gas cabinet will take over a year to supply. I'm not
aware of the companies they consulted for the supply of this cabinet, but
I guess they only asked companies in Canada.



Do you have any names of companies in North America capable of supplying
gas cabinets, with contacts to share please?



Thank you for your help!

Christophe



Christophe Clément

Professionnel de recherche

Laboratoire de microfabrication (LMF)

Groupe des Couches Minces (GCM) www.gcmlab.ca
<https://urldefense.com/v3/__http:/www.gcmlab.ca/__;!!DZ3fjg!4-28lGLwpXtZM
DJf5MrBUv84f3h7qSUp_JoOU2TfAJkjvjOyDL3x1wClkxo_8Us6S00aapwcNASfUm99o06UL09
Rb15q_U1h5Q$>

Ecole Polytechnique de Montréal
<https://urldefense.com/v3/__http:/www.polymtl.ca/__;!!DZ3fjg!4-28lGLwpXtZ
MDJf5MrBUv84f3h7qSUp_JoOU2TfAJkjvjOyDL3x1wClkxo_8Us6S00aapwcNASfUm99o06UL0
9Rb15ifayUYA$> www.polymtl.ca

Département de génie physique

* 2900 Boulevard Edouard Monpetit

Pavillon JAB
Campus de l'Université de Montréal
Montréal (Québec) H3T 1J4


8  <mailto:christophe.clement at polymtl.ca> christophe.clement at polymtl.ca

( 514 340 4711 #2417

Fax : 514 340 5195







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