[labnetwork] Suggestion for nitrogen generator

Chen, Li li-chen at ucl.ac.uk
Mon Nov 4 10:49:03 EST 2024


Hello cleanroom experts,

We at London Centre for Nanotechnology rely on the liquid nitrogen boil off for our cleanroom tools for purging, venting, N2 gun, etc. However the running cost reviewed recently is very high. So what we propose is to introduce a nitrogen generator to supply a large amount for daily operation, and reduce the Liquid Nitrogen consumption. Therefore the total cost should go down in the long term operation.

It is very much appreciated if you can share your experience for nitrogen generator use at your facility.

We are particularly interested in the following:
What purity / grade of nitrogen can your nitrogen generator produce? Where do you use for this nitrogen in your facility: venting process chambers, vacuum pump purging, nitrogen gun? Which manufacturer do you use / recommend to use? It is expensive to do the maintenance/service? How long do you need to have a maintenance service for the nitrogen generator?

Many thanks!
Li

Dr Li Chen (he/him)
Cleanroom Manager
London Centre for Nanotechnology
17-19 Gordon Street
London WC1H 0AH
li-chen at ucl.ac.uk<mailto:li-chen at ucl.ac.uk>
T: +44 (0) 2081387840
https://lcn-cleanroom.com/
https://www.london-nano.com/services
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