[labnetwork] PECVD dilute gas question(s)

[Nathan Aultman]

Hello Labnetwork,

We have a PECVD system using dilute silane (2%)/N2.  Some labs with similar systems use dilute silane (5%)/helium.  We are nearing the end of our current cylinder and will need a replacement soon.  What are the advantages and disadvantages when choosing the dilute gas?  Does choosing a helium mixture produce more desirable films and/or quality?  In other words, is it worth it to purchase a cylinder with helium?  Also, what would be the reason(s) for using helium as an additional process gas?  E.g., a separate MFC and gas line.

Thank you all in advance.

Nathan C. Aultman
University of Central Florida
407-823-6852
naultman at creol.ucf.edu<mailto:naultman at creol.ucf.edu>

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