[labnetwork] Cleanroom humidity

[Paolini, Steven]

We have multiple photo tools, including EBL and a stepper that are sensitive to changes in RH. What's most important, aside from the actual value, is consistency. if your RH is not consistent, it will affect the photo speed. Here at Harvard CNS, we maintain 52% +_ 2 which is relatively easy to maintain and comfortable for our occupants.
Steve Paolini (Equipment Dood)

________________________________
From: labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of Alex Dixon <agdixon at mines.edu>
Sent: Wednesday, December 17, 2025 1:12 PM
To: Lab Network <labnetwork at mtl.mit.edu>
Subject: [labnetwork] Cleanroom humidity

For those of you with climate controls in your cleanrooms, what relative humidity do your keep your cleanroom at, and how tightly do you control the fluccuations?  How significant an effect have you seen on device performance?

Our campus facilities is doing a climate control audit and asking any lab with special requirements to justify them. Any info you could share would be appreceated.

Thanks!
-Alex

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Alex Dixon, Ph.D. (He/Him)
Lab Manager
Nanofabrication and Thin Film Deposition
Shared Instrument Facility
Colorado School of Mines

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