[labnetwork] R&D CMP question

[Malhotra, Sandra Guy]

Howdy All,
We are in the final stages of evaluating R&D CMP tools for AggieFab and have narrowed our search down to the GNP Poli-400L, Logitech Tribo, or Logitech Orbis. In doing a quick Google search, I see that these are present in academic fabs. Can any lab managers or process engineers who have experience with these tools summarize their pros and cons, and perhaps why they chose one of the other?

Thanks in advance for your always great insights!

Best,



Sandra G. Malhotra, Ph.D.  |  Senior Laboratory Manager


We would greatly appreciate an acknowledgement of your work in AggieFab:  “The nanofabrication was conducted in the Texas A&M University AggieFab Nanofabrication Facility (RRID:SCR_023639), which is supported by the Texas A&M Engineering Experiment Station and Texas A&M University."


AggieFab Nanofabrication Facility

https://aggiefab.tamu.edu/

Department of Electrical & Computer Engineering, College of Engineering | Texas A&M University

3253 TAMU | College Station, TX 77843

ph: 979.845.3199  |  sandra.malhotra at tamu.edu<mailto:sandra.malhotra at tamu.edu>


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TEXAS A&M UNIVERSITY | FEARLESS on Every Front



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