[labnetwork] Choosing proper liner for coating tungsten by ebeam evaporation
shokoofe haghighi
shokoofe_haghighi at yahoo.com
Sun Feb 23 06:32:20 EST 2025
Hi, hope you are having good days
This is Haghighi, working on coating tungsten by ebeam evaporation.we have tested different liners till now, such as Graphite, Mo, W, Al2O3 and Cu. None of them worked in fact all were ruined before w evaporatin even starts, some just melted, some were finished with a hole at their bottom. At Graphite and W liners we got some evaporation rate (by QCM) but nothing was really coated.
I would really appreciate every suggestion, have anyone tested TaC? Does it work?
Thanks in advance for your time and attention
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