[labnetwork] SU-8 in Heidelberg DWL66+

[JAYER A FERNANDES]

Hi,
I'm interested in using SU-8 on our Heidelberg system. I've checked with staff about the diode specs and we have a 375nm laser.

I'm interested in learning about the following

  1.
What steps do you have in place to keep contamination to a minimum, since we only have one system.
  2.
Does anyone have an exposure recipe that I could go off? It would be helpful if you also mention what SU-8 and the thickness you use. I can't seem to find specifics on how these system parameters correspond to a dosage.

Thanks in advance!

Regards


Jayer Fernandes

Micro/Nano Sensors and Actuators Laboratory (MNSA)
Department of Electrical and Computer Engineering
University of Wisconsin - Madison
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