[labnetwork] Gas cabinet installation by contractors or facility

Paolini, Steven spaolini at cns.fas.harvard.edu
Tue Mar 4 16:47:29 EST 2025


Joe,
  There are a lot of moving parts to your question. My expertise is in this field. I would suggest that you contact me directly to avoid a digital ping-pong session.
  Best regards,

Steve Paolini
Principal Equipment Engineer
Harvard University Center for Nanoscale Systems
11 Oxford St.
Cambridge, MA 02138
617- 496- 9816
spaolini at cns.fas.harvard.edu
www.cns.fas.harvard.edu

From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Joseph Losby
Sent: Tuesday, March 04, 2025 12:40 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Gas cabinet installation by contractors or facility

Dear Labnetwork,

We are currently in the design development phase of constructing a cleanroom facility.  The intention is to have about 40-50% of the cleanroom unused on opening day that is reserved for future tools.  Although we have scoped out what future equipment we wish to acquire, they are not finalized.

Our contractors wish to install the gas cabinets (they are included in the project budget) for both the currently scoped and future tools.  Because the cabinet configurations are equipment dependent (most will be for RIE and CVD/dep tools), we are trying to decide if it's worth the contractors installing 'generic' cabinets for future tools that we can configure ourselves (install gas monitoring, safety showers, etc).

Do you feel this is a feasible approach and if so, what would you install? Or, would you rather install the cabinets yourselves entirely?

Cheers,
Joe




Joseph Losby, PhD

Manager, qLab Operations

joseph.losby at ucalgary.ca<mailto:joseph.losby at ucalgary.ca>



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