[labnetwork] ideas to clean gold sputter target

[Fubo Rao]

Dear Colleagues,

What would you recommend for cleaning this Au sputter target that has been
partially coated/contaminated with other materials? There are probably a
few material coatings on the target, before this was found out. Sputtering
the materials off, or sand blasting will waste a lot of gold. Thanks in
advance.

[image: image.png]

Thanks,

Fubo Rao, Ph.D.,
Nano3 Technical Director,
Qualcomm Institute/Atkinson Hall,
UC San Diego
9500 Gilman Drive #0436
La Jolla, CA 92093-0436
Tel. (858)534-4518
Cell: (858)375-9190
E-mail: furao at ucsd.edu
https://nanofab.ucsd.edu/
About Nano3 <https://nanofab.ucsd.edu/about/>
[image:
https://www.linkedin.com/company/ucsd-nano3-shared-research-facility/]
<https://www.linkedin.com/company/ucsd-nano3-shared-research-facility/>
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