[labnetwork] Install manual or specs for a Optec Light Bench for Laser Liftoff?

[Clifford F Knollenberg]

Does anyone have and install manual or installation specs for an Optec Light Bench?

I don't care about the wavelength at this point.  I just need to see how they handle the excimer waste gas.

Thank you,

Cliff



Cliff Knollenberg

Processing Engineer - Lithography

Stanford Nanofabrication Facility

650-721-1274

[Image]



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