[labnetwork] Plasma Therm Takachi clamp

[Price, Aimee]

Hello lab network,
Our new Plasma Takachi etcher has been down for months waiting on a replacement clamp which broke. We have had 4 clamps break since this was installed about 18 months ago. We had a spare which also broke, 3 weeks after the in before. Their original date was 4/11 but now they have no update and no plan. We have two on order. Apparently they thinned down the middle of the clamp and this is where breakage occurs.

Does anyone have a spare of this clamp on hand? The part number is M0004986


We also have ordered the “old style” clamp on order, which is part number 411209016701<tel:411209016701>. It is scheduled to ship in mid June, although I have little faith. This one has consistent ceramic thickness across the entire part.


Does anyone have a spare of either if the parts above that you’d be willing to sell us?


Thank you,


Aimee Bross Price


Manager, Nanofabrication

The Ohio State University

Nanotech West Lab

Institute for Materials and Manufacturing Research

1381 Kinnear Road

Suite 100

Columbus, OH 43212

614-292-2753<tel:614-292-2753>

Price.798 at osu.edu<mailto:Price.798 at osu.edu>

Nanotech.osu.edu



Pronouns: she/her/hers


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