[labnetwork] Looking of Isotropic Silicon etch using XeF2

[Joseph Jacob]

Hi Long,

We have an Xactix XeF2 etch tool at the Utah nanofab at the University of Utah. There are two forms that you would need to complete in order to request work through our billing system and schedule the service request.

Please reach out to me by email if you are interested and I will provide the links to the request forms.

Best,
Joe


[cid:908690f9-59bd-4082-9470-9ed3586e3089]

Joseph Jacob

Process Engineer

University of Utah

College of Engineering-Utah Nanofab

36 S. Wasatch Drive, Rm 2528

Salt Lake City, Utah 84112

Office) 801-587-1219



________________________________
From: labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of Chang, Long <lvchang at Central.UH.EDU>
Sent: Tuesday, November 11, 2025 8:49 AM
To: labnetwork at mtl.mit.edu <labnetwork at mtl.mit.edu>
Subject: [labnetwork] Looking of Isotropic Silicon etch using XeF2

Hello,

Does anyone provide an isotropic silicon etch using XeF2 as a paid service?

Thanks,
Long

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