[labnetwork] Looking of Isotropic Silicon etch using XeF2
Matthias Pleil
mpleil at unm.edu
Wed Nov 12 21:09:15 EST 2025
University of New Mexico also provide XeF2 service as well. Feel free to email me if you wish to set up a zoom discussion.
Kind Regards,
Matthias Pleil, Ph.D.
Director Manufacturing Engineering Program
UNM MTTC Cleanroom Manager
Research Professor & Lecturer Mech. Eng - UNM
Office: (505)272-7157
________________________________
From: labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of John Tamelier <jtamelier at ucsd.edu>
Sent: Tuesday, November 11, 2025 3:34 PM
To: Chang, Long <lvchang at central.uh.edu>
Cc: labnetwork at mtl.mit.edu <labnetwork at mtl.mit.edu>
Subject: Re: [labnetwork] Looking of Isotropic Silicon etch using XeF2
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[EXTERNAL]
Hello Long,
UCSD offers XeF2 etching as a service. Please feel free to contact me if you have any questions or would like more information.
Best regards,
John
-----------------------------------
John Tamelier
Nano3 Assistant Director
University of California, San Diego
Atkinson Hall, 5th Floor Front Desk, M/C 0436
9500 Gilman Drive
La Jolla, California 92093-0436
Phone: (858) 246-2735
Fax: (858) 534-9092
E-mail: jtamelier at ucsd.edu<mailto:jtamelier at ucsd.edu>
http://nanofab.ucsd.edu<http://nanofab.ucsd.edu/>
-----------------------------------
On Tue, Nov 11, 2025 at 10:19 AM Chang, Long <lvchang at central.uh.edu<mailto:lvchang at central.uh.edu>> wrote:
Hello,
Does anyone provide an isotropic silicon etch using XeF2 as a paid service?
Thanks,
Long
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