[labnetwork] SiO2 sputtering deposition rate - quick question

[Youry Borisenkov]

Hi All,
This question is hard to google, so I appreciate your experience.
I just changed to a new SiO2 target on our AJA magnetron and the deposition
rate decreased by 25%.
Is this something I should be expecting since the target is thicker now
since it's new?
We use a 0.125" thick Copper bonded target.

I recently changed a TiO2 target and the rate stayed similar.
-- 
Thank you and have a great weekend,
Youry Borisenkov
CNI <https://cni.columbia.edu/columbia-university-clean-room>
Columbia University
CEPSR 1017, New York, NY, 10027, United States.
<https://sustainable.columbia.edu/crown-commuter>
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20251114/113a5f50/attachment.html>