[labnetwork] Boron Evaporation or Sputtering

[Dan P. Woodie]

Most Excellent Lab Network,

We have a request for boron deposition between 50 - 300 nm thick on various substrates (metal and carbon). This is a new material for us, so we are examining which tool makes the most sense, and we are interested if anyone has any experience with this process that they can share in terms of process compatibility, risks, or tool impacts. Thank you.

Dan

Daniel Woodie
Director, Micro/Nanofabrication Center, Princeton Materials Institute
Princeton University
155 Andlinger Center
86 Olden St
Princeton, NJ 08540

(609)258-5922 (office)
(607)227-2993 (cell)
daniel.woodie at princeton.edu<mailto:daniel.woodie at princeton.edu>
mnfc.princeton.edu<https://mnfc.princeton.edu/>
www.linkedin.com/in/danielpwoodie<http://www.linkedin.com/in/danielpwoodie/>




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