[labnetwork] UPS for high-vac tools

[Yakimov, Michael]

There is a SEMI standard, to which all newer tools have to adhere, saying that short (1 or 2 periods of AC) should not cause problems. So double conversion is an overkill - at least for newer tools.

A piece of advice for later discussion:
You have to very carefully consider and set up automatic response to power loss. Software to my oldish UPS was set up to continue running things until UPS battery is below certain point, and then safely shutdown  the system. Easier for IT, more difficult for the tool.
You CANNOT assume someone is available to shut things down. Maybe it's at night, maybe it's an electrical fire and the building is evacuated.  You don't want to shutdown on short glitch (1 second while upstream gear switches) though.
Do you want to keep entire system on, or only the most critical parts (e.g. Emitters)  and maybe control system? Price difference may be non-trivial.  And control has to be designed with UPS option in mind for the thing to work smoothly.

You also have to consider battery type. Lead batteries don't last too long, and enthusiasm about UPS maintenance and nattery replacement tends to die out after 2-3 cycles. LiFePO4 seem to be the current best bet - not a cheap one though.

Just a few thoughts...

Mike
_______________________________________________

Michael Yakimov

Research scientist

Department  of Nanoscale Science and Engineering

University at Albany - State University of NY



253 Fuller rd.

Albany NY 12203



Phone: 518-437-8609 lab

e-mail: myakimov at albany.edu<mailto:myakimov at albany.edu>





________________________________
From: labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of Luciano Agustín Patrone <lpatrone at inti.gob.ar>
Sent: Tuesday, October 21, 2025 7:09 AM
To: Alizadeh, Hossein <halizade at bu.edu>; labnetwork at mtl.mit.edu <labnetwork at mtl.mit.edu>
Subject: Re: [labnetwork] UPS for high-vac tools

Good morning Hossein,

At INTI, we have a FIB-SEM and we've had electrical problems that caused damage to one of the IGPs. We have installed a 10kVA/9kW ALTRON UPS with 20x12V 9Ah internal batteries.
This system protects the equipment, but upstream of the UPS, we have an electric generator to maintain uninterrupted power supply to the FIB-SEM.
If you need more details or have any other questions, please don't hesitate to contact us.
Best regards,

Ing. Luciano A. Patrone
Responsable Lab. Microscopia Electrónica

INSTITUTO NACIONAL DE TECNOLOGÍA INDUSTRIAL
Dirección Técnica de Micro y Nano Tecnologías
SubGerencia Áreas de Conocimiento


Teléfono (54 11) 4724 6200/300/400
Interno 6754
lpatrone at inti.gob.ar
www.inti.gob.ar<http://www.inti.gob.ar>
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________________________________
De: labnetwork <labnetwork-bounces at mtl.mit.edu> en nombre de Alizadeh, Hossein <halizade at bu.edu>
Enviado: lunes, 20 de octubre de 2025 12:56
Para: labnetwork at mtl.mit.edu <labnetwork at mtl.mit.edu>
Asunto: [labnetwork] UPS for high-vac tools

Hi everyone,
We recently experienced a power outage that caused damage to several of our high-vac systems. We’re now considering installing UPS units for some of our more sensitive tools (etchers, SEMs, TEM) One key question is whether to use double-conversion UPS systems or opt for less expensive alternatives.
If you have experience using UPS systems with these types of instruments, I’d appreciate any recommendations, guidance, or brand suggestions you’ve found reliable. Your input would be helpful as we evaluate the best option for our needs.
Best,
Hossein

---------------------------------------------
Hossein Alizadeh, PhD.
Technical Director,
Photonics Center, Boston University
halizade at bu.edu
617-353-0632

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