[labnetwork] UPS for high-vac tools

[Jing Guo]

Hi Hossein, 

To make it simple, our facility purchased several UPS units to protect our instruments like XRD, TEM etc from unplanned power interruptions last year. Those UPS units easily costs ~$40k/unit with ~ 18KVA capacity. It should be able to support the system for several minutes. The warranty should be at least 5 yrs. The life time should be also around 10yrs. Our Ebeam litho (EBL) system is running with a UPS since the installation. The EBL will perform a shutdown procedure if it starts to switch to the UPS after the power outage. 


Best,
Jing 
---------------------------------------
Jing Guo Ph.D.
Cleanroom Manager/Research Scientist
SEA Cleanroom (SST 017)
Rice University
Houston, TX 
jeanne.guo at rice.edu
713-348-8227

> On Oct 20, 2025, at 10:56 AM, Alizadeh, Hossein <halizade at bu.edu> wrote:
> 
> Hi everyone,
> We recently experienced a power outage that caused damage to several of our high-vac systems. We’re now considering installing UPS units for some of our more sensitive tools (etchers, SEMs, TEM) One key question is whether to use double-conversion UPS systems or opt for less expensive alternatives.
> If you have experience using UPS systems with these types of instruments, I’d appreciate any recommendations, guidance, or brand suggestions you’ve found reliable. Your input would be helpful as we evaluate the best option for our needs.
> Best,
> Hossein
> 
> ---------------------------------------------
> Hossein Alizadeh, PhD.
> Technical Director,
> Photonics Center, Boston University
> halizade at bu.edu <mailto:halizade at bu.edu>
> 617-353-0632
> 
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