[labnetwork] Opinions on using DMSO over other solvents like NMP to remove resist?

[Michael Robles]

Hi everyone,

We are investigating switching to DMSO from NMP-based solvents for general resist removal. For those of you that use DMSO what is your experience? Have you seen advantages from using DMSO over other solvents (time, safety, cost, etc.)? What sort of extra precautions, PPE, or training do you give the users? What grade of DSMO do you use? ULSI grade?

Regards,
Michael


Michael Robles (He/Him)

Senior Process Engineer Litho/Exfab

Stanford Nanofabrication Facility

[Image]

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