[labnetwork] Does anyhow know the best starting parameters to use for a Pulsed Laser deposition of BST (Barium Strontium Titanate (50/50 stoichiometricc ratio

[Robert Vandusen]

Hello Labnetwork.
A researcher in our lab is looking to get a Pulsed Laser Deposition of 500nm thick Barium Strontium Titanate (50-50 stoichiometric ratio).
We do not have this capability. He was able find another lab which can do the deposition but they would like to know best starting parameters for this deposition.
Can anyone provide some starting points for the parameters listed below


  1.  Laser Energy in fluence J/area or Spot Size of laser
  2.  Repetition rate- generally 10Hz
  3.  Chamber Oxygen Partial Pressure - 75mTorr
  4.  Target - Substrate distance = 5cm
  5.  Substrate heating temperature (so it doesn't crack on annealing)

We would also be interested in knowing if other labs have this capability.
Thanks
Rob
Robert Vandusen
   Microfabrication Lab Facility Manager
   Electronics Department
   Carleton University
   Ottawa, Canada
   613-520-2600 ext 5761  Cell 613-791-5761
   Robert_vandusen at cunet.carleton.ca<mailto:Robert_vandusen at cunet.carleton.ca>

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