[labnetwork] litho spin developer

[Garry J. Bordonaro]

Kurt,

 

We have been using automated developers for over 20 years.  The advantages
are *reproducibility*, reduced chemical usage, reduced glassware usage.  

 

The only disadvantage for us is maintenance, although that is generally
quite low.  You may have issues with chemical disposal depending on your
local rules and the particular equipment you use.  Piece work can be done
with some effort and special chucks.

 

Users like them as they get better and more consistent results, and do not
have to deal with pouring chemicals and glassware.

 

The tools can be expensive.  We got ours during the 2000 bubble crash
auctions.

 

 

Garry J. Bordonaro

Microlithographic Engineer

Cornell NanoScale Facility

250 Duffield Hall

343 Campus Road

Ithaca NY 14853-2700

(607) 254-4936

 <mailto:bordonaro at cnf.cornell.edu> bordonaro at cnf.cornell.edu

 <http://www.cnf.cornell.edu/> http://www.cnf.cornell.edu/

 

Please acknowledge CNF in your publications:

"This work was performed in part at the Cornell NanoScale Science &
Technology Facility (CNF), a member of the National Nanotechnology
Coordinated Infrastructure (NNCI), which is supported by the National
Science Foundation (Grant NNCI-2025233)."

 

 

 

 

From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Kurt Kupcho
Sent: Tuesday, April 14, 2026 10:25 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] litho spin developer

 

Hi all

 

I was wondering who out there has litho spin developers vs. doing litho
development manually with dishes.  

 

Do you users/students like the spin developer?

 

Advantages and disadvantages of the spin developer?

 

Any opinions and guidance would be much appreciated!

 

Thank you

Kurt

 

 

Kurt Kupcho

Materials Science Engineer

Nanoscale Fabrication Center (NFC)

University of Wisconsin

1550 Engineering Dr.

ECB 3110

Madison, WI  53706

E:   <mailto:kurt.kupcho at wisc.edu> kurt.kupcho at wisc.edu

T:  608-262-2982



 

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