[labnetwork] CoFeB Etching

[Peter Lomax]

Hi,
Does anybody have any wet etching suggestions for CoFeB?
For thin films we normally argon mill it but have application needing a thicker layer which would take forever.
Any suggestion greatly appreciated.
Best
Peter


Dr Peter Lomax,
Principal Experimental Officer, The School of Engineering, The University of Edinburgh,
Scottish Microelectronics Centre,
Alexander Crum Brown Road, Edinburgh, EH9 3FF
Phone:  +44 (0) 131 650 7146
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