[labnetwork] Antimony-selenide dry etching

[Nathan Aultman]

Greetings Labnetwork

Do any of you permit dry etching of antimony-selenide films?  Do  you have any restrictions or concerns that arise for use and maintenance?  We have a research group that would like to use CHF3 and Argon to etch this in one of our ICP etchers.

Thank you in advance.

Nathan C. Aultman
University of Central Florida
407-823-6852
naultman at creol.ucf.edu<mailto:naultman at creol.ucf.edu>

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