[labnetwork] Safety concerns sputtering BaTiO3 and BaZrO3

[Salam Elhalabi]

Hi everyone,

Just curious if anyone has ever sputtered BaTiO3 and BaZrO3? We are more interested in knowing what, if any, precautionary measures did you have to take and if there was anything extra for the maintenance of your sputter tool.

We are hesitant in allowing these 2 materials into our system, because we would sandblast the chimney parts afterwards. We already allow Nickel to be sputtered, and we would have to wear our mask with the combo cartridge (organic vapor/acid and P100) whenever it's time to open the chamber and do the sandblasting. According to the SDS sheets for these 2 materials, it's considered acutely toxic, especially if inhaled or ingested.

Many thanks in advance for any insights you can share.

Best,

Salam Elhalabi

____________________________________
Salam Elhalabi
ASRC Cleanroom Technician
City University of New York




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