[labnetwork] Crystal Monitor

[Mohammad Mohtasim Hamid Pial]

Dear All

I am requiring some assistant regarding one of the sensors in our sputtering system which is used to measure thickness and deposition rate.  We use Telemark 851-0600-4. Our instrument is installed to control one crystal sensor inside a sputtering chamber. Our crystal is shutterless. We are curious how we should calibrate for different materials and different geometric locations (I have included images of the recipes for each material below)?

Our crystal is attached to an arm that can rotate out of the way to a set position that provides space for our sputtering sample. We understood based on the manual that the tooling factor can be used to accommodate geometric variations between the crystal and the sample. However, when we adjust the tooling factor to change the final thickness to our measured value, it has no effect on the deposition rate displayed. Thiis means that although the final value changes, further deposition will not be accurately recorded.

I'm not sure why this is the case, but I have some suspicions. For one I am concerned whether our material properties listed in the recipes below are accurate. Currently we are working with ZrO2 and NiFe alloy 20:80. We had a hard time finding these values online and we are concerned if there is an accurate way to determine them experimentally. Another concern is user error in installation or operation. Occasionally while not set to run, our telemark will display a crystal failure error, this especially happens when we open the chamber or accidentally press the sensor button but sometimes it will happen while idle for too long. We have also noticed that the crystal health has not decreased passed 98% after we have deposited several hundred nanometers. Please advise if the crystal needs to be replaced/adjusted or if we are doing else something wrong? Is there any other value we need to modify to adjust the deposition rate.

Thank you in advance for your help with this matter. Please let us know what additional information you might need to further assist us.




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