[labnetwork] House vacuum system vendors/recommendations?

Dennis Schweiger schweig at umich.edu
Fri Jan 30 14:12:44 EST 2026


Jeff,

good afternoon.  Here at UofM/LNF we've had several different liquid ring
systems over the years.  One was original to the lab/building (1984
vintage) and a second that was installed as part of the lab expansion back
in 2007.  Both systems have been replaced (about 5 years ago) with a pair
of Quincy QSV-345 vacuum pumps. We have a large holding tank (~600 gallon)
in between the vacuum pumps and the delivery system.  These two Quincy
pumps alternate every week, and to date, have performed flawlessly with
just routine maintenance.

At one point, while we were switching from the old vacuum pumps to the new
ones (about 6 weeks), we used a couple of Ebara A70's to provide the
vacuum.  That was OK short term, but not something that was workable long
term.

Thanks,

Dennis Schweiger
University of Michigan/LNF
Facilities

734.647.2055 Ofc


On Fri, Jan 30, 2026 at 8:31 AM Jeff Salzmann <jks7 at buffalo.edu> wrote:

> Good morning!
>
> I am looking to get some quotes collected for a house vacuum system- not
> for cleaning but simply for spin-coater vacuum, chucks, etc.
>
> If you can recommend some vendors, please let me know. Thank you!!!!
>
> Regards,
> Jeff
>
> Jeff Salzmann
>
> Research Assistant Professor of Electrical Engineering
>
> Cleanroom Manager, Shared Instrumentation Laboratories
>
> School of Engineering and Applied Sciences
>
> University at Buffalo
>
> 114A Davis Hall
>
> Buffalo, NY 14260
>
> Tel: 716.645.2584
>
>
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