[labnetwork] Carbon paper in vacuum systems

Chris Cott Chris.Cott at nanomelbourne.com
Sun Mar 8 18:58:47 EDT 2026


Dear all,

I am wondering if anyone has used carbon paper in a vacuum system. We have
a user that wants to use it in our AJA sputtering system but I am worried
about friable microparticles entering the turbo pump. Does anyone know the
below product or have any experience with this?

"Freudenberg H23C5 is a flexible and easy to use carbon paper Gas Diffusion
Layer (GDL) with a Microporous Layer (MPL).  It is 220 um (microns) thick @
1 MPa compression."

Warm regards,
Chris.

-------------------------------------------------------------------------------------------
Chris Cott     *BAppSc, BSc, PhD.*

Process Engineer,

Melbourne Centre for Nanofabrication

151 Wellington Road, Clayton  3168

Victorian Node of the Australian National Fabrication Facility
Ph:  +61 (3) 9905 1562

W:   http://nanomelbourne.com

W:   http://www.anff.org.au <http://anff.org.au/>

E:    chris.cott at nanomelbourne.com
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