[labnetwork] CHF3 availability?

[Aamer Mahmood]

Jeff,
We had to purchase CHF3 in October 2025 and faced the same supply issue with Airgas, our traditional supplier. Fortunately, Linde were able to provide us at a very reasonable price and with a 4-6 week lead time.
My contact is:

Kevin Paetsch
Territory Manager - Specialty Gases
kevin.paetsch at linde.com
Cell: 219-742 7479

Best regards,

--
Aamer Mahmood

Executive Director
Pritzker Nanofabrication Facility
William Eckhardt Research Center
University of Chicago
5640 S. Ellis Ave., Chicago, IL 60637

Tel: +1 (773) 702 8903
Web: pnf.uchicago.edu

From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Christophe Clément
Sent: Tuesday, March 10, 2026 5:12 PM
To: Jeff Salzmann <jks7 at buffalo.edu>; Network Fab <labnetwork at mtl.mit.edu>
Subject: Re: [labnetwork] CHF3 availability?

Hi Jeff
I just purchased an ED cylinder of CHF3 last week from Advanced Speciality Gas, lead time is really short (2 days).
Service from this company is number 1.

Here is the contact information:


Matt Pearce

Advanced Specialty Gases

135 Catron Dr.

Reno, NV. USA  89512

Ph: 775-356-5500

Fax: 775-356-5571

matt at advancedspecialtygases.com<mailto:matt at advancedspecialtygases.com>

www.advancedspecialtygases.com<https://urldefense.com/v3/__http:/www.advancedspecialtygases.com/__;!!BpyFHLRN4TMTrA!_EteJFf70QiK2Zi132YwIokcMFiEKO2qJ8PRSyphQwU-LHNSyEJiWj2ccejwcZ-n_Uy1IrnzDkUblYdM95kNP0oQU4-t8bw$>





Christophe Clément

Professionnel de recherche

Laboratoire de microfabrication (LMF)

Groupe des Couches Minces (GCM) www.<https://urldefense.com/v3/__http:/www.gcmlab.ca/__;!!BpyFHLRN4TMTrA!_EteJFf70QiK2Zi132YwIokcMFiEKO2qJ8PRSyphQwU-LHNSyEJiWj2ccejwcZ-n_Uy1IrnzDkUblYdM95kNP0oQ3QuS2jk$>polymtl.ca/gcmlab

Ecole Polytechnique de Montréal www.polymtl.ca<https://urldefense.com/v3/__http:/www.polymtl.ca/__;!!BpyFHLRN4TMTrA!_EteJFf70QiK2Zi132YwIokcMFiEKO2qJ8PRSyphQwU-LHNSyEJiWj2ccejwcZ-n_Uy1IrnzDkUblYdM95kNP0oQrlyxPQU$>

Département de génie physique

* 2900 Boulevard Edouard Monpetit

Pavillon JAB
Campus de l'Université de Montréal
Montréal (Québec) H3T 1J4

* christophe.clement at polymtl.ca<mailto:christophe.clement at polymtl.ca>

* 514 340 4711 #2417

Fax : 514 340 5195

________________________________
De : Jeff Salzmann <jks7 at buffalo.edu<mailto:jks7 at buffalo.edu>>
Envoyé : 10 mars 2026 11:37
À : Network Fab <labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>>
Objet : [labnetwork] CHF3 availability?

Good morning,

I am looking to purchase some CHF3 for a new RIE system I am having installed here.

Airgas has informed me that, "Also, note that R-23 as of January 1, 2022, CHF3 (R23) has been identified for Phasedown under the EPA AIM Act (https://www.epa.gov/climate-hfcs-reduction/phasedown-hydrofluorocarbons-hfcs-issuing-allowance-allocations<https://urldefense.com/v3/__https:/www.epa.gov/climate-hfcs-reduction/phasedown-hydrofluorocarbons-hfcs-issuing-allowance-allocations__;!!BpyFHLRN4TMTrA!_EteJFf70QiK2Zi132YwIokcMFiEKO2qJ8PRSyphQwU-LHNSyEJiWj2ccejwcZ-n_Uy1IrnzDkUblYdM95kNP0oQ1Wsqirw$> ).  The customer will either need to provide us with an allotment from the EPA (in MTeV's) in order to supply, or we can purchase MTeV's on the open market for a significantly higher cost."

Since that time, I have waited nearly three months for them not to provide a quote.

According to the EPA's website on HFC "phase down":

https://www.epa.gov/climate-hfcs-reduction/frequent-questions-phasedown-hydrofluorocarbons#how-allowance-determined<https://urldefense.com/v3/__https:/www.epa.gov/climate-hfcs-reduction/frequent-questions-phasedown-hydrofluorocarbons*how-allowance-determined__;Iw!!BpyFHLRN4TMTrA!_EteJFf70QiK2Zi132YwIokcMFiEKO2qJ8PRSyphQwU-LHNSyEJiWj2ccejwcZ-n_Uy1IrnzDkUblYdM95kNP0oQaQVF0ZU$>

Application-specific Allowances: Through at least 2030, EPA is issuing application-specific allowances to entities that use HFCs in one of four applications:


  1.  A propellant in metered dose inhalers (MDIs)

  1.  Structural composite preformed polyurethane foam for marine use and trailer use

  1.  The etching of semiconductor material or wafers and the cleaning of chemical vapor deposition chambers within the semiconductor manufacturing sector

  1.  Onboard aerospace fire suppression

Can anyone offer some guidance to either get the allowance issued or a vendor that can help with this?

Thanks!!!
Jeff


Jeff Salzmann

Research Assistant Professor of Electrical Engineering

Cleanroom Manager, Shared Instrumentation Laboratories

School of Engineering and Applied Sciences

University at Buffalo, 114A Davis Hall

105 White Road

Buffalo, NY 14260-2500

Tel: 716.645.2584


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