[labnetwork] Oxford PlasmaPro 100

[Francis R Manfred]

I've had good luck with this company:   PSI Repair Services | Industrial Repair & Upgrade Services<https://www.psi-repair.com/>

Kind regards,


Francis


Francis R. Manfred
Sr Etch Research Engineer

Purdue University








________________________________
From: labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of Nadia Pervez <np65 at rice.edu>
Sent: Friday, October 2, 2026 9:05 AM
To: Mike Maghiar <rmm2263 at columbia.edu>
Cc: Fab Network <labnetwork at mtl.mit.edu>
Subject: Re: [labnetwork] Oxford PlasmaPro 100

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Hi Mike,

Advanced Energy recently quoted us ~$5k for repair on our PlasmaPro 100's 3kW ICP power supply.

Nadia

Nadia Pervez, PhD
Cleanroom Research Scientist
Shared Equipment Authority (SEA)
Rice University
6100 Main St, MS-686
Houston, TX 77005
np65 at rice.edu<mailto:np65 at rice.edu>
Office: SST-017, 713-348-5069
Cell: 805-284-1193

On Thu, Oct 1, 2026, 3:59 PM Mike Maghiar <rmm2263 at columbia.edu<mailto:rmm2263 at columbia.edu>> wrote:
Hi all,

Our PlasmaPro 100 ICP RF unit has failed, and I was wondering if anyone knows a trusted source for repairs like this.

The unit is deprecated, and the solution available through Oxford is only to purchase a refurbished unit.

Thank you,
Mike Maghiar
CNI Cleanroom Director
CEPSR 1020
(212) 854-3032
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