[labnetwork] Invitation: NAPEX Virtual Symposium – Frontiers in Nanoscale Plasma Etching | Oct. 20–21, 2026
GaJula, Durga R
dgajula3 at gatech.edu
Fri Oct 9 07:58:13 EDT 2026
Dear Colleagues,
LAST CALL FOR REGISTRATION!
LAST Call The North American Plasma Etch Exchange (NAPEX) is pleased to invite you to our upcoming virtual symposium, “Frontiers in Nanoscale Plasma Etching,” taking place October 20–21, 2026, from 1:00–4:10 PM ET each day.
This two-day symposium will bring together researchers and professionals from academia, industry, nanofabrication facilities, and the semiconductor community to exchange knowledge and discuss recent developments and emerging challenges in plasma etching and atomic layer processing.
The program features invited speakers representing Applied Materials, Silicon Austria Labs, Oxford Instruments, University of Nevada Reno, UC Berkeley, SENTECH, AlixLabs, Caltech, IonQ, Engenius Micro, Georgia Tech, and UCSB.
The technical program will cover topics including atomic layer etching (ALE), plasma-enhanced atomic layer processes, advanced semiconductor manufacturing, ferroelectric materials, wide-bandgap materials, SiC, lithium niobate and diamond etching, advanced logic and memory technologies, and emerging plasma-processing applications.
Registration (free):
Register for the NAPEX Virtual Symposium<https://docs.google.com/forms/d/e/1FAIpQLSfZAfvSjEE48ldxSiTaOgf4S8qSQY9e_cCWegHbZbNWUmhQvw/viewform>
Full program and event information:
Frontiers in Nanoscale Plasma Etching – Event Page<https://sites.google.com/view/napex-plasma-etch-exchange/upcoming-events-oct-20th>
We encourage faculty, researchers, students, cleanroom and nanofabrication staff, process engineers, and semiconductor professionals to participate.
Please feel free to forward this invitation to your colleagues, students, research groups, and professional networks who may be interested.
We look forward to seeing you at the symposium.
--
NAPEX Team
North American Plasma Etch Exchange (NAPEX)
Vincent Genova — Cornell University (Retired)
Ling Xie — Harvard University
Lavendra Mandyam — Stanford University
Durga Gajula — Georgia Tech
[??] NAPEX Website<https://sites.google.com/view/napex-plasma-etch-exchange/>
[??] Follow NAPEX on LinkedIn<https://www.linkedin.com/company/north-american-plasma-etch-exchange-napex>
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